Biira, Saphina; Alawad; Bissett, H; Nel, J. T; Hlatshwayo, T. T; Crouse, P. L; Malherbe, J. B
(Busitema University ; SA Institute of Physics, 2016)
The synthesis of ZrC layers was performed in an in-house developed, vertical-wall chemical vapour deposition (CVD) system operating at atmospheric pressure. Zirconium tetrachloride and methane were used as zirconium and ...